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Special Issue on ‘Extreme Micro/Nanomanufacturing towards Ultrasmall Dimension’


Guest Editors:

Prof. Huigao Duan 

Hunan University, China

Email: duanhg@hnu.edu.cn   

Extremely small manufacturing methods have been playing a key role on integrated-circuits industry and developing nanodevices and microsystems. It is believed that there are still plenty of room to further push the micro/nanomanufacturing to the smaller dimension for high performance device applications. However, at the ultrasmall scale, particularly when approaching the atomic scale, the mechanical, thermal and chemicamechanisms during the manufacturing are supposed to be much different from those at the macroscale. Therefore, developing new manufacturing methods and processes based on high-end equipment and new mechanisms for extremely small features is highly demanded.


The aim of this special theme is to provide a forum for researchers and practitioners to present and review the state-of-the-art development, premier challenges and foresight visions in Extreme Micro/Nanomanufacturing for Ultrasmall Dimension, with an emphasis on scaling effects, new processes, new tools and new applications. Extreme manufacturing parameters with ultrasmall size, ultrahigh precision, large area, complex geometry and high performance are preferred.


Possible topics, within this scope, include but are not limited to:

. Scaling Effects in Micro/Nanomanufacturing

. Charged-particle-based Processes and Applications

. 3D Micro/Nanomanufacturing

. Laser-based Ultrasmall Micro/Nanomanufacturing

. Traditional or Non-traditional Mechanical Micro/Nanomanufacturing

. Scanning-probe-based Processes and Applications

. Nanoscale Molding and Replica Processes

. Nanoscale CMOS Processes for non-CMOS Applications

. Functionality-oriented Self-Assembly Processes

. Functionality-oriented Hybrid Ultrasmall Manufacturing Processes


Please submit your papers in light of following important dates for the special issue:

Submission deadline: 31 January 2020         

First round of reviews: 15 February 2020

Final submission and decision: 29 February 2020    

Publication: April-July 2020

Submission portal at International Journal of Extreme Manufacturing:

https://iopscience.iop.org/journal/2631-7990/page/about

About the journal: https://iopscience.iop.org/journal/2631-7990/page/about

Articles List