Joo W J et al 2020 Metasurface-driven OLED displays beyond 10,000 pixels per inch Science 370 459–63 |
Xu L H, Ou Q D, Li Y Q, Zhang Y B, Zhao X D, Xiang H Y, Chen J D, Zhou L, Lee S T and Tang J X 2016 Microcavity-free broadband light outcoupling enhancement in flexible organic light-emitting diodes with nanostructured transparent metal–dielectric composite electrodes ACS Nano 10 1625–32 |
Pourdavoud N, Wang S, Mayer A, Hu T, Chen Y W, Marianovich A, Kowalsky W, Heiderhoff R, Scheer H C and Riedl T 2017 Photonic nanostructures patterned by thermal nanoimprint directly into organo-metal halide perovskites Adv. Mater. 29 1605003 |
Wang C H, Fan Y, Shao J Y, Yang Z J, Sun J X, Tian H M and Li X M 2021 Discretely-supported nanoimprint lithography for patterning the high-spatial-frequency stepped surface Nano Res. 14 2606–12 |
Cao T, Lian M, Liu K, Lou X C, Guo Y M and Guo D M 2022 Wideband mid-infrared thermal emitter based on stacked nanocavity metasurfaces Int. J. Extrem. Manuf. 4 015402 |
Li P N, Dolado I, Alfaro-Mozaz F J, Casanova F, Hueso L E, Liu S, Edgar J H, Nikitin A Y, Vélez S and Hillenbrand R 2018 Infrared hyperbolic metasurface based on nanostructured van der Waals materials Science 359 892–6 |
Kuznetsov A I, Miroshnichenko A E, Brongersma M L, Kivshar Y S and Luk’Yanchuk B 2016 Optically resonant dielectric nanostructures Science 354 aag2472 |
Wang C H, Lai D S, Fan Y, Tian H M, Li X M, Chen X L and Shao J Y 2021 Nanoimprinting metal-containing nanoparticle-doped gratings to enhance the polarization of light-emitting chips by induced scattering Nanotechnology 32 235304 |
Wu G B, Zhu S Y, Pang S W and Chan C H 2022 Superheterodyne-inspired waveguide-integrated metasurfaces for flexible free-space light manipulation Nanophotonics 11 4499–514 |
Feng B, Chen Y F, Sun D, Yang Z Y, Yang B, Li X and Li T 2021 Precision integration of grating-based polarizers onto focal plane arrays of near-infrared photovoltaic detectors for enhanced contrast polarimetric imaging Int. J. Extrem. Manuf. 3 035201 |
Tian W, Liu D, Cao F R and Li L 2017 Hybrid nanostructures for photodetectors Adv. Opt. Mater. 5 1600468 |
Oh D K, Lee T, Ko B, Badloe T, Ok J G and Rho J 2021 Nanoimprint lithography for high-throughput fabrication of metasurfaces Front. Optoelectron. 14 229–51 |
Zhu S Y, Wu G B, Pang S W and Chan C H 2022 Compact terahertz dielectric folded metasurface Adv. Opt. Mater. 10 2101663 |
Zhou P L, Yu H B, Zhong Y, Zou W H, Wang Z D and Liu L Q 2020 Fabrication of waterproof artificial compound eyes with variable field of view based on the bioinspiration from natural hierarchical micro–nanostructures Nano-Micro Lett. 12 166 |
Ji D Y, Li T and Fuchs H 2020 Patterning and applications of nanoporous structures in organic electronics Nano Today 31 100843 |
So S and Rho J 2019 Designing nanophotonic structures using conditional deep convolutional generative adversarial networks Nanophotonics 8 1255–61 |
Ma Z B, Jiang C Y, Yuan W Z and He Y 2013 Large-scale patterning of hydrophobic silicon nanostructure arrays fabricated by dual lithography and deep reactive ion etching Nano-Micro Lett. 5 7–12 |
Lee Y H, Lee T K, Song I, Yu H, Lee J, Ko H, Kwak S K and Oh J H 2016 Boosting the performance of organic optoelectronic devices using multiple-patterned plasmonic nanostructures Adv. Mater. 28 4976–82 |
Willson C G and Roman B J 2008 The future of lithography: SEMATECH Litho Forum 2008 ACS Nano 2 1323–8 |
Chen Y Q, Shu Z W, Zhang S, Zeng P, Liang H K, Zheng M J and Duan H G 2021 Sub-10 nm fabrication: methods and applications Int. J. Extrem. Manuf. 3 032002 |
Totzeck M, Ulrich W, Göhnermeier A and Kaiser W 2007 Pushing deep ultraviolet lithography to its limits Nat. Photon. 1 629–31 |
Zhu X L, Czolkos I, Johansson A, Nielsen T and Kristensen A 2021 Master origination by 248nm DUV lithography for plasmonic color generation Appl. Phys. Lett. 118 141103 |
Thomas J 2007 Body sculpting Nat. Nanotechnol. 2 |
Yong J L, Yang Q, Huo J L, Hou X and Chen F 2022 Underwater gas self-transportation along femtosecond laser-written open superhydrophobic surface microchannels (<100 µm) for bubble/gas manipulation Int. J. Extrem. Manuf. 4 015002 |
Wierer J J Jr, David A and Megens M M 2009 III-nitride photonic-crystal light-emitting diodes with high extraction efficiency Nat. Photon. 3 163–9 |
Leung S F, Zhang Q P, Xiu F, Yu D L, Ho J C, Li D D and Fan Z Y 2014 Light management with nanostructures for optoelectronic devices J. Phys. Chem. Lett. 5 1479–95 |
Kim S, Hyun S, Lee J, Lee K S, Lee W and Kim J K 2018 Anodized aluminum oxide/polydimethylsiloxane hybrid mold for roll-to-roll nanoimprinting Adv. Funct. Mater. 28 1800197 |
Cai Y J, Qin A J and Tang B Z 2017 Siloles in optoelectronic devices J. Mater. Chem. C 5 7375–89 |
Huang X H and Li T 2020 Recent progress in the development of molecular-scale electronics based on photoswitchable molecules J. Mater. Chem. C 8 821–48 |
Zhang J H, Li Y F, Zhang X M and Yang B 2010 Colloidal self-assembly meets nanofabrication: from two-dimensional colloidal crystals to nanostructure arrays Adv. Mater. 22 4249–69 |
Li J, Hu Y X, Yu L, Li L, Ji D Y, Li L Q, Hu W P and Fuchs H 2021 Recent advances of nanospheres lithography in organic electronics Small 17 2100724 |
Weber D, Heimburger R, Hildebrand D, Junghans T, Schondelmaier G, Walther C and Schondelmaier D 2019 Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography Appl. Phys. A 125 307 |
Wu J, Geng Z X, Xie Y Y, Fan Z Y, Su Y, Xu C and Chen H D 2019 The fabrication of nanostructures on polydimethylsiloxane by laser interference lithography Nanomaterials 9 73 |
Cai S X, Sun Y L, Chu H H, Yang W G, Yu H B and Liu L Q 2021 Microlenses arrays: fabrication, materials, and applications Microsc. Res. Tech. 84 2784–806 |
Ahn S H and Guo L J 2009 Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting ACS Nano 3 2304–10 |
Leitgeb M, Nees D, Ruttloff S, Palfinger U, Götz J, Liska R, Belegratis M R and Stadlober B 2016 Multilength scale patterning of functional layers by roll-to-roll ultraviolet-light-assisted nanoimprint lithography ACS Nano 10 4926–41 |
Jeong B, Han H, Kim H H, Choi W K, Park Y J and Park C 2020 Polymer-assisted nanoimprinting for environmentand phase-stable perovskite nanopatterns ACS Nano 14 1645–55 |
Zhao Z J et al 2021 Large-area nanogap-controlled 3D nanoarchitectures fabricated via layer-by-layer nanoimprint ACS Nano 15 503–14 |
Sreenivasan S V 2017 Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits Microsyst. Nanoeng. 3 17075 |
Palmieri F, Adams J, Long B, Heath W, Tsiartas P and Willson C G 2007 Design of reversible cross-linkers for step and flash imprint lithography imprint resists ACS Nano 1 307–12 |
Wang Z, Zhu S J, Shan X Y, Yuan Z X, Cui X G and Tian P F 2021 Full-color micro-LED display based on a single chip with two types of InGaN/GaN MQWs Opt. Lett. 46 4358–61 |
Zhang H et al 2022 Monolithic GaN optoelectronic system on a Si substrate Appl. Phys. Lett. 121 181103 |
Chen W X, Hu X H, Ni Z B, Han T Q and Lu X F 2016 State of strain in GaN material as derived by optical feedback measurement Optik 127 3976–8 |
Tan C L, Chen J Z, Wu X J and Zhang H 2018 Epitaxial growth of hybrid nanostructures Nat. Rev. Mater. 3 17089 |
Martin-Bragado I and Sarikov A 2016 Atomistic modeling of epitaxial growth of semiconductor materials Mater. Sci. Semicond. Process. 42 223–9 |
Chen F R et al 2022 Mass transfer techniques for large-scale and high-density microLED arrays Int. J. Extrem. Manuf. 4 042005 |
Guo L J 2007 Nanoimprint lithography: methods and material requirements Adv. Mater. 19 495–513 |
Schmitt H, Duempelmann P, Fader R, Rommel M, Bauer A J, Frey L, Brehm M and Kraft A 2012 Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography Microelectron. Eng. 98 275–8 |
Hu X, Wang H Q, Zhai C, Ge H X and Cui Y S 2016 Fabrication of metallic patterns on highly curved substrates via nanoimprint lithography in association with an etch-in process J. Mater. Chem. C 4 11104–9 |
Wang C H, Shao J Y, Lai D S, Tian H M and Li X M 2019 Suspended-template electric-assisted nanoimprinting for hierarchical micro-nanostructures on a fragile substrate ACS Nano 13 10333–42 |
Zhao S Y, Song Y X, Liang H, Jin T T, Lin J J, Yue L, You T G, Wang C, Ou X and Wang S M 2020 Stress and strain analysis of Si-based III–V template fabricated by ion-slicing Chin. Phys. B 29 077303 |
Ben J W et al 2019 Influence of dislocations on the refractive index of AlN by nanoscale strain field Nanoscale Res. Lett. 14 184 |
Myers D R 1991 Issues in the realization of strained-layer quantum well optoelectronic devices Opt. Quant. Electron. 23 S985–94 |
Song J, Ding Z, Liu X F, Huang Z C, Li J W, Wei J M, Luo Z J, Wang J H and Guo X 2021 The effect of biaxial tensile strain on structure and photoelectric properties of Fe-doped GaN monolayer Comput. Mater. Sci. 197 110644 |
Fu X W, Nie H X, Sun Z P, Feng M, Chen X, Liu C, Liu F, Yu D P and Liao Z M 2022 Bending strain effects on the optical and optoelectric properties of GaN nanowires Nano Res. 15 4575–81 |
Sonne M R, Smistrup K, Hannibal M, Thorborg J, Nørregaard J and Hattel J H 2015 Modeling and simulation of the deformation process of PTFE flexible stamps for nanoimprint lithography on curved surfaces J. Mater. Process. Technol. 216 418–29 |
Jeon S et al 2021 Rotating cylinder-assisted nanoimprint lithography for enhanced chemisorbable filtration complemented by molecularly imprinted polymers Small 17 2105733 |
Dickson M N, Tsao J, Liang E I, Navarro N I, Patel Y R and Yee A F 2017 Conformal reversal imprint lithography for polymer nanostructuring over large curved geometries J. Vac. Sci. Technol. B 35 021602 |
Wang C H, Shao J Y, Tian H M, Li X M, Ding Y C and Li B Q 2016 Step-controllable electric-field-assisted nanoimprint lithography for uneven large-area substrates ACS Nano 10 4354–63 |