Van Driel H M, Sipe J E and Young J F 1982 Laser-induced periodic surface structure on solids: a universal phenomenon Phys. Rev. Lett. 491955–8 |
Nathala C S R, Ajami A, Ionin A A, Kudryashov S I, Makarov S V, Ganz T, Assion A and Husinsky W 2015 Experimental study of fs-laser induced sub-100-nm periodic surface structures on titanium Opt. Express 235915–29 |
Gao Y F, Yu C Y, Han B, Ehrhardt M, Lorenz P, Xu L F and Zhu R H 2020 Picosecond laser-induced periodic surface structures (LIPSS) on crystalline silicon Surf. Interfaces 19100538 |
Wagner R and Gottmann J 2007 Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation J. Phys.: Conf. Ser. 59333–7 |
Borowiec A and Haugen H K 2003 Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses Appl. Phys. Lett. 824462–4 |
Sakabe S, Hashida M, Tokita S, Namba S and Okamuro K 2009 Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse Phys. Rev. B 79033409 |
Shimotsuma Y, Kazansky P G, Qiu J R and Hirao K 2003 Self-organized nanogratings in glass irradiated by ultrashort light pulses Phys. Rev. Lett. 91247405 |
Reif J, Varlamova O and Costache F 2008 Femtosecond laser induced nanostructure formation: self-organization control parameters Appl. Phys. A 921019–24 |
Hashida M, Nishii T, Miyasaka Y, Sakagami H, Shimizu M, Inoue S and Sakabe S 2016 Orientation of periodic grating structures controlled by double-pulse irradiation Appl. Phys. A 122484 |
Le Harzic R, Stracke F and Zimmermann H 2013 Formation mechanism of femtosecond laser-induced high spatial frequency ripples on semiconductors at low fluence and high repetition rate J. Appl. Phys. 113183503 |
Miyazaki K and Miyaji G 2013 Nanograting formation through surface plasmon fields induced by femtosecond laser pulses J. Appl. Phys. 114153108 |
Bonse J, Krüger J, Höhm S and Rosenfeld A 2012 Femtosecond laser-induced periodic surface structures J. Laser Appl. 24042006 |
Wang C, Huo H B, Johnson M, Shen M Y and Mazur E 2010 The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations Nanotechnology 21075304 |
Huang M, Zhao F L, Cheng Y, Xu N S and Xu Z Z 2009 Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser ACS Nano 34062–70 |
Vorobyev A Y and Guo C L 2008 Colorizing metals with femtosecond laser pulses Appl. Phys. Lett. 92041914 |
Bonse J and Krüger J 2010 Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon J. Appl. Phys. 108034903 |
Mezera M, Van Drongelen M and Römer G R B E 2018 Laser-induced periodic surface structures (LIPSS) on polymers processed with picosecond laser pulses J. Laser Micro Nanoeng. 13105–16 |
Castillejo M, Ezquerra T A, Martín M, Oujja M, Pérez S and Rebollar E 2012 Laser nanostructuring of polymers: ripples and applications AIP Conf. Proc. 1464372–80 |
Sugioka K 2017 Progress in ultrafast laser processing and future prospects Nanophotonics 6393–413 |
Florian C, Kirner S V, Krüger J and Bonse J 2020 Surface functionalization by laser-induced periodic surface structures J. Laser Appl. 32022063 |
Bonse J, Koter R, Hartelt M, Spaltmann D, Pentzien S, Höhm S, Rosenfeld A and Krüger J 2014 Femtosecond laser-induced periodic surface structures on steel and titanium alloy for tribological applications Appl. Phys. A 117103–10 |
Vorobyev A Y and Guo C L 2011 Antireflection effect of femtosecond laser-induced periodic surface structures on silicon Opt. Express 19 A1031–6 |
Varlamova O, Reif J, Stolz M, Borcia R, Borcia I D and Bestehorn M 2019 Wetting properties of LIPSS structured silicon surfaces Eur. Phys. J. B 9291 |
Bai S, Serien D, Ma Y, Obata K and Sugioka K 2020 Attomolar sensing based on liquid interface-assisted surface-enhanced Raman scattering in microfluidic chip by femtosecond laser processing ACS Appl. Mater. Interfaces 1242328–38 |
Levy Y, Derrien T J Y, Bulgakova N M, Gurevich E L and Mocek T 2016 Relaxation dynamics of femtosecond-laser-induced temperature modulation on the surfaces of metals and semiconductors Appl. Surf. Sci. 374157–64 |
Gurevich E L 2016 Mechanisms of femtosecond LIPSS formation induced by periodic surface temperature modulation Appl. Surf. Sci. 37456–60 |
Fraggelakis F, Mincuzzi G, Lopez J, Manek-Hönninger I and Kling R 2019 Controlling 2D laser nano structuring over large area with double femtosecond pulses Appl. Surf. Sci. 470677–86 |
Reif J, Varlamova O, Uhlig S, Varlamov S and Bestehorn M 2014 On the physics of self-organized nanostructure formation upon femtosecond laser ablation Appl. Phys. A 117179–84 |
Varlamova O, Costache F, Reif J and Bestehorn M 2006 Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light Appl. Surf. Sci. 2524702–6 |
Varlamova O, Reif J, Varlamov S and Bestehorn M 2011 The laser polarization as control parameter in the formation of laser-induced periodic surface structures: comparison of numerical and experimental results Appl. Surf. Sci. 2575465–9 |
Dufft D, Rosenfeld A, Das S K, Grunwald R and Bonse J 2009 Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO J. Appl. Phys. 105034908 |
Le Harzic R, Dörr D, Sauer D, Stracke F and Zimmermann H 2011 Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation Appl. Phys. Lett. 98211905 |
Buividas R, Rosa L, Šliupas R, Kudrius T, Šlekys G, Datsyuk V and Juodkazis S 2011 Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback Nanotechnology 22055304 |
Miyaji G, Hagiya M and Miyazaki K 2017 Excitation of surface plasmon polaritons on silicon with an intense femtosecond laser pulse Phys. Rev. B 96045122 |
Kerse C et al 2016 Ablation-cooled material removal with ultrafast bursts of pulses Nature 53784–88 |
Sugioka K 2021 Will GHz burst mode create a new path to femtosecond laser processing? Int. J. Extrem. Manuf. 3043001 |
Cheng C W and Chen J K 2020 Ultrafast laser ablation of copper by GHz bursts Appl. Phys. A 126649 |
Butkus S, Jukna V, Paipulas D, Barkauskas M and Sirutkaitis V 2020 Micromachining of invar foils with GHz, MHz and kHz femtosecond burst modes Micromachines 11733 |
Bonamis G, Audouard E, Hönninger C, Lopez J, Mishchik K, Mottay E and Manek-Honninger I 2020 Systematic study of laser ablation with GHz bursts of femtosecond pulses Opt. Express 2827702–14 |
Mishchik K, Bonamis G, Qiao J, Lopez J, Audouard E, Mottay E, Hönninger C and Manek-Hönninger I 2019 High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source Opt. Lett. 442193–6 |
Caballero-Lucas F, Obata K and Sugioka K 2022 Enhanced ablation efficiency for silicon by femtosecond laser microprocessing with GHz bursts in MHz bursts(BiBurst) Int. J. Extrem. Manuf. 4015103 |
Žemaitis A, Gaidys M, Gečys P, Barkauskas M and Gedvilas M 2021 Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates Opt. Express 297641–53 |
Obata K, Caballero-Lucas F and Sugioka K 2021 Material processing at GHz burst mode by femtosecond laser ablation J. Laser Micro Nanoeng. 1619–23 |
Giannuzzi G, Gaudiuso C, Di Franco C, Scamarcio G, Lugar a P M and Ancona A 2019 Large area laser-induced periodic surface structures on steel by bursts of femtosecond pulses with picosecond delays Opt. Lasers Eng. 11415–21 |
Liu J M 1982 Simple technique for measurements of pulsed Gaussian-beam spot sizes Opt. Lett. 7196–8 |
Green M A 2008 Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients Sol. Energy Mater. Sol. Cells 921305–10 |
Schultze M et al 2014 Attosecond band-gap dynamics in silicon Science 3461348–52 |
Bazkir Ö 2009 Quantum efficiency determination of unbiased silicon photodiode and photodiode based trap detectors Rev. Adv. Mater. Sci. 2190–98 |
Markovic M I and Rakic A D 1990 Determination of the reflection coefficients of laser light of wavelengths λϵ(0.22µm, 200µm) from the surface of aluminum using the Lorentz-Drude model Appl. Opt. 293479–83 |
Contreras G, Sood A K, Cardona M and Compaan A 1984 Effect of free carriers on the Raman frequency of ultraheavily doped N-Si Solid State Commun. 49303–5 |
Hulin D, Combescot M, Bok J, Migus A, Vinet J Y and Antonetti A 1984 Energy transfer during silicon irradiation by femtosecond laser pulse Phys. Rev. Lett. 521998–2001 |
De Laurentis M and Irace A 2014 Optical measurement techniques of recombination lifetime based on the free carriers absorption effect J. Solid State Phys. 2014291469 |
Zhang C Y, Yao J W, Liu H Y, Dai Q F, Wu L J, Lan S, Trofimov V A and Lysak T M 2012 Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses Opt. Lett. 371106–8 |
Höhm S, Rosenfeld A, Krüger J and Bonse J 2013 Area dependence of femtosecond laser-induced periodic surface structures for varying band gap materials after double pulse excitation Appl. Surf. Sci. 2787–12 |
Höhm S, Rohloff M, Rosenfeld A, Krüger J and Bonse J 2013 Dynamics of the formation of laser-induced periodic surface structures on dielectrics and semiconductors upon femtosecond laser pulse irradiation sequences Appl. Phys. A 110553–7 |
Höhm S, Herzlieb M, Rosenfeld A, Krüger J and Bonse J 2013 Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation Appl. Phys. Lett. 103254101 |