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Volume 5 Issue 1
Jan.  2023
Article Contents

Kawabata S, Bai S, Obata K, Miyaji G, Sugioka K. 2023. Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses. Int. J. Extrem. Manuf. 5 015004.
Citation: Kawabata S, Bai S, Obata K, Miyaji G, Sugioka K. 2023. Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses. Int. J. Extrem. Manuf. 015004.

Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses


doi: 10.1088/2631-7990/acb133
More Information
  • Publish Date: 2023-01-30
  • Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses (single-pulse mode). However, most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material removal. In this study, we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures (LIPSS) on silicon. It is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization direction. In contrast, we find that the GHz burst mode femtosecond laser (wavelength: 1030 nm, intra-pulse duration: 220 fs, intra-pulse interval time (intra-pulse repetition rate): 205 ps (4.88 GHz), burst pulse repetition rate: 200 kHz) creates unique two-dimensional (2D) LIPSS. We regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic mechanism. Specifically, generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D LIPSS. Additionally, hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.

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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses

doi: 10.1088/2631-7990/acb133
  • 1 RIKEN Center for Advanced Photonics, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan;
  • 2 Department of Applied Physics, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan

Abstract: 

Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses (single-pulse mode). However, most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material removal. In this study, we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures (LIPSS) on silicon. It is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization direction. In contrast, we find that the GHz burst mode femtosecond laser (wavelength: 1030 nm, intra-pulse duration: 220 fs, intra-pulse interval time (intra-pulse repetition rate): 205 ps (4.88 GHz), burst pulse repetition rate: 200 kHz) creates unique two-dimensional (2D) LIPSS. We regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic mechanism. Specifically, generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D LIPSS. Additionally, hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.

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