Ohmori H and Nakagawa T 1995 Analysis of mirror surface generation of hard and brittle materials by ELID (electronic in-process dressing) grinding with superfine grain metallic bond wheels CIRP Ann. 44287–90 |
Agarwal S and Rao P V 2008 Experimental investigation of surface/subsurface damage formation and material removal mechanisms in SiC grinding Int. J. Mach. Tools Manuf. 48698–710 |
Li C, Piao Y, Meng B B, Hu Y X, Li L Q and Zhang F H 2022 Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals Int. J. Mach. Tools Manuf. 172103827 |
Santailler J L et al 2020 From 5” CdZnTe ingots to high quality (111) CdZnTe substrates for SWIR 2K215μm pitch infrared focal plane arrays manufacturing Proc. SPIE 11407114070G |
Szeles C 2004 Advances in the crystal growth and device fabrication technology of CdZnTe room temperature radiation detectors IEEE Trans. Nucl. Sci. 511242–9 |
Dwivedi A D D 2011 Analytical modeling and numerical simulation of P+-Hg0.69 Cd0.31Te/n-Hg0.78Cd0.22Te/CdZnTe heterojunction photodetector for a long-wavelength infrared free space optical communication system J. Appl. Phys. 110043101 |
Gavrishchuk E M and Yashina E V 2004 Zinc sulfide and zinc selenide optical elements for IR engineering J. Opt. Technol. 71822–7 |
Chen W Q, Liang Y C, Luo X C, Sun Y Z and Wang H R 2014 Multi-scale surface simulation of the KDP crystal fly cutting machining Int. J. Adv. Manuf. Technol. 73289–97 |
Li Y, Kang R K, Gao H, Wang J H and Lang Y J 2009 Nanomechanical behaviors of (110) and (111) CdZnTe crystals investigated by nanoindentation Rare Met. 28570–5 |
Broult T, Kerlain A, Destefanis V, Guinedor P, Bourhis E L and Patriarche G 2021 Development of a cryogenic indentation tool with in situ optical observation, application to the mechanical characterization of II–VI semiconductors Semicond. Sci. Technol. 36035015 |
Irwan R, Huang H, Zheng H Y and Wu H 2013 Mechanical properties and material removal characteristics of soft-brittle HgCdTe single crystals Mater. Sci. Eng. A 559480–5 |
Lei W, Antoszewski J and Faraone L 2015 Progress, challenges, and opportunities for HgCdTe infrared materials and detectors Appl. Phys. Rev. 2041303 |
Deadmore D L and Sliney H E 1987 Hardness of CaF2 and BaF2 Solid Lubricants at 25–670℃ NASA Technical Memorandum 88979(Cleveland, Ohio) |
Schultz R A, Jensen M C and Bradt R C 1994 Single crystal cleavage of brittle materials Int. J. Fract. 65291–312 |
Hahn D 2014 Calcium fluoride and barium fluoride crystals in optics Opt. Photon. 945–48 |
Grillo S E, Ducarroir M, Nadal M, Tourni E and Faurie J P 2002 Nanoindentation of Si, GaP, GaAs and ZnSe single crystals J. Phys. D: Appl. Phys. 36 L5–9 |
Huang W H and Yan J W 2020 Surface formation mechanism in ultraprecision diamond turning of coarse-grained polycrystalline ZnSe Int. J. Mach. Tools Manuf. 153103554 |
Fang T and Lambropoulos J C 2002 Microhardness and indentation fracture of potassium dihydrogen phosphate (KDP) J. Am. Ceram. Soc. 85174–8 |
Mizumoto Y, Aoyama T and Kakinuma Y 2011 Basic study on Ultraprecision machining of single-crystal calcium fluoride Proc. Eng. 19264–9 |
Julie L L, James J P, John D H and William R R 2005 Hardness, elastic modulus, and fracture toughness bulk properties in corning calcium fluoride Proc. SPIE 57541329–38 |
Canon Optron, Inc 2021 Products CaF2(fluorite) (available at: https://optron.canon/en/fluorite/products_caf2.html) |
Lawn B R and Marshall D B 1979 Hardness, toughness, and brittleness: an indentation analysis J. Am. Ceram. Soc. 62347–50 |
Zong W J, Cao Z M, He C L and Xue C X 2016 Theoretical modelling and FE simulation on the oblique diamond turning of ZnS crystal Int. J. Mach. Tools Manuf. 10055–71 |
Aldabib J M and Ishak Z A M 2020 Effect of hydroxyapatite filler concentration on mechanical properties of poly (methyl methacrylate) denture base SN Appl. Sci. 2732 |
Khadraoui S, Hachemi M, Allal A, Rabiei M, Arabi A, Khodja M, Lebouachera S E I and Drouiche N 2021 Numerical and experimental investigation of hydraulic fracture using the synthesized PMMA Polym. Bull. 783803–20 |
Mukaida M and Yan J W 2017 Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo Int. J. Mach. Tools Manuf. 1152–14 |
Giredmet Company. CdZnTe substrate (available at: https:// giredmet.ru/ru/production/podlozhki-cdznte/) |
Sumitomo Electric Industries, Ltd ZnSe lens (available at: www.sumitool.com/products/laser-optics/co2laser/lens. html) |
Canon Optron, Inc History of fluorite lenses (available at: https://optron.canon/ja/domain/fluorite/history.html) |
Zhang Y, Hou N and Zhang L C 2020 Effect of ultra-precision fly-cutting on the surface integrity of potassium dihydrogen phosphate crystals Opt. Mater. Express 10971–80 |
Fang F Z and Chen L J 2000 Ultra-precision cutting for ZKN7 glass CIRP Ann. 4917–20 |
Yan J W, Asami T, Harada H and Kuriyagawa T 2009 Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining Precis. Eng. 33378–86 |
Antwi E K, Liu K and Wang H 2018 A review on ductile mode cutting of brittle materials Front. Mech. Eng. 13251–63 |
Huang H, Li X L, Mu D K and Lawn B R 2021 Science and art of ductile grinding of brittle solids Int. J. Mach. Tools Manuf. 161103675 |
You K Y, Yan G P, Luo X C, Gilchrist M D and Fang F Z 2020 Advances in laser assisted machining of hard and brittle materials J. Manuf. Process. 58677–92 |
Wang J J, Zhang J F, Feng P F and Guo P 2018 Damage formation and suppression in rotary ultrasonic machining of hard and brittle materials: a critical review Ceram. Int. 441227–39 |
Lawn B R, Borrero-Lopez O, Huang H and Zhang Y 2021 Micromechanics of machining and wear in hard and brittle materials J. Am. Ceram. Soc. 1045–22 |
Zhang T, Jiang F, Huang H, Lu J, Wu Y Q, Jiang Z Y and Xu X P 2021 Towards understanding the brittle–ductile transition in the extreme manufacturing Int. J. Extreme Manuf. 3022001 |
Zhang B and Yin J F 2019 The ‘skin effect’ of subsurface damage distribution in materials subjected to high-speed machining Int. J. Extreme Manuf. 1012007 |
Guo X G, Li Q, Liu T, Kang R K, Jin Z J and Guo D M 2017 Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials Front. Mech. Eng. 1289–98 |
Goel S, Luo X C, Agrawal A and Reuben R L 2015 Diamond machining of silicon: a review of advances in molecular dynamics simulation Int. J. Mach. Tools Manuf. 88131–64 |
Zhu W L and Beaucamp A 2020 Compliant grinding and polishing: a review Int. J. Mach. Tools Manuf. 158103634 |
Luo H, Ajmal K M, Liu W, Yamamura K and Deng H 2021 Polishing and planarization of single crystal diamonds: state-of-the-art and perspectives Int. J. Extreme Manuf. 3022003 |
Qu M N, Xie G Z, Jin T, Cai R and Lu A G 2019 Realization of high efficiency and low damage machining of anisotropic KDP crystal by grinding Precis. Eng. 55464–73 |
Zhang Y, Hou N and Zhang L C 2019 Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting Adv. Manuf. 7270–7 |
Zhang Z Y, Xu C G, Zhang X Z and Guo D M 2012 Mechanical characteristics of nanocrystalline layers containing nanotwins induced by nanogrinding of soft-brittle CdZnTe single crystals Scr. Mater. 67392–5 |
Wang S F, An C H, Zhang F H, Wang J, Lei X Y and Zhang J F 2016 An experimental and theoretical investigation on the brittle ductile transition and cutting force anisotropy in cutting KDP crystal Int. J. Mach. Tools Manuf. 10698–108 |
Azami S, Kudo H, Mizumoto Y, Tanabe T, Yan J W and Kakinuma Y 2015 Experimental study of crystal anisotropy based on ultra-precision cylindrical turning of single-crystal calcium fluoride Precis. Eng. 40172–81 |
Yao L X, Zhang L, Jiang Q Q and Yang C F 2020 Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon Semicond. Sci. Technol. 35095010 |
Gao H, Wang X, Guo D M and Chen Y C 2017 Research progress on ultra-precision machining technologies for soft-brittle crystal materials Front. Mech. Eng. 1277–88 |
Momma K and Izumi F 2011 VESTA3 for three-dimensional visualization of crystal, volumetric and morphology data J. Appl. Crystallogr. 441272–6 |
Hou Z B and Komanduri R 2003 On the mechanics of the grinding process—part I. Stochastic nature of the grinding process Int. J. Mach. Tools Manuf. 431579–93 |
Kumar S, Tong Z and Jiang X Q 2022 Advances in the design and manufacturing of novel freeform optics Int. J. Extreme Manuf. 4032004 |
Zhou T F, He Y P, Wang T X, Zhu Z C, Xu R Z, Yu Q, Zhao B, Zhao W X, Liu P and Wang X B 2021 A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding Int. J. Extreme Manuf. 3042002 |
Nagayama K and Yan J W 2021 Deterministic error compensation for slow tool servo-driven diamond turning of freeform surface with nanometric form accuracy J. Manuf. Process. 6445–57 |
Yan J W, Tamaki J, Syoji K and Kuriyagawa T 2004 Ductile regime machining of single-crystal CaF2 for aspherical lenses Key Eng. Mater. 257–25895–100 |
Chen Y H, Sun L H and Wu Y B 2022 Improving the machining performance in single-point diamond turning of curved Zerodur optics by using straight-nosed cutting tools J. Mater. Process. Technol. 310117777 |
Jasinevicius R G, Duduch J G, Cirino G A and Pizani P S 2013 Diamond turning of small Fresnel lens array in single crystal InSb J. Micromech. Microeng. 23055025 |
Gao X, Xue C X, Chao Y and Liu Y 2021 Optimization method of manufacturing for diamond turning soft-brittle materials’ harmonic diffractive optical elements Appl. Opt. 60162–71 |
Yan J W, Maekawa K, Tamaki J and Kuriyagawa T 2005 Micro grooving on single-crystal germanium for infrared Fresnel lenses J. Micromech. Microeng. 151925–31 |
Blake P N and Scattergood R O 1990 Ductile-regime machining of germanium and silicon J. Am. Ceram. Soc. 73949–57 |
Heidari M, Akbari J and Yan J W 2019 Effects of tool rake angle and tool nose radius on surface quality of ultraprecision diamond-turned porous silicon J. Manuf. Process. 37321–31 |
Ohta T, Yan J W, Yajima S, Takahashi Y, Horikawa N and Kuriyagawa T 2007 High-efficiency machining of single-crystal germanium using large-radius diamond tools Int. J. Surf. Sci. Eng. 1374–92 |
Fuchs B A, Hed P P and Baker P C 1986 Fine diamond turning of KDP crystals Appl. Opt. 251733–5 |
Zong W J, Li Z Q, Zhang L, Liang Y C, Sun T, An C H, Zhang J F, Zhou L and Wang J 2013 Finite element simulation of diamond tool geometries affecting the 3D surface topography in fly cutting of KDP crystals Int. J. Adv. Manuf. Technol. 681927–36 |
Huang W H and Yan J W 2021 Effect of tool shape on the machined surface integrity of polycrystalline ZnSe In Proc. 21st Int. Conf. European Society for Precision Engineering and Nanotechnology, EUSPEN 2021(EUSPEN) pp 387–90(available at: www.euspen. eu/knowledge-base/ICE21236.pdf) |
Xiao H P, Liang R G, Spires O, Wang H R, Wu H and Zhang Y Y 2019 Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal Opt. Express 2728364–82 |
Geng R W, Yang X J, Xie Q M, Zhang W Q, Kang J, Liang Y Q and Li R 2021 Ultra-precision diamond turning of ZnSe ceramics: surface integrity and ductile regime machining mechanism Infrared Phys. Technol. 115103706 |
Kakinuma Y, Azami S and Tanabe T 2015 Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator CIRP Ann. 64117–20 |
Mizumoto Y, Kangawa H, Nakagawa Y, Itobe H, Tanabe T and Kakinuma Y 2016 Influence of nose radius on surface integrity in ultra-precision cylindrical turning of single-crystal calcium fluoride Proc. CIRP 45139–42 |
Mizumoto Y, Kangawa H, Itobe H, Tanabe T and Kakinuma Y 2017 Influence of crystal anisotropy on subsurface damage in ultra-precision cylindrical turning of CaF2 Precis. Eng. 49104–14 |
Yan J 2011 Ultraprecision cutting of photoresist/gold composite microstructures CIRP Ann. 60133–6 |
Mahajan K A, Pawade R S and Mishra V 2022 Tool vibration effect on surface roughness of polymethylmethacrylate in diamond turning Mater. Manuf. Process. 37271–82 |
Bodlapati C, Dow T, Wong A and Garrard K 2018 Surface finish and diamond tool wear when machining PMMA and PC optics Proc. SPIE 10742107420D |
Yan J W, Syoji K and Tamaki J I 2004 Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride J. Vac. Sci. Technol. B 2246–51 |
Yan J W, Syoji K, Kuriyagawa T and Suzuki H 2002 Ductile regime turning at large tool feed J. Mater. Process. Technol. 121363–72 |
Yan J W, Tamaki J I, Syoji K and Kuriyagawa T 2004 Single-point diamond turning of CaF2 for nanometric surface Int. J. Adv. Manuf. Technol. 24640–6 |
Huang W H and Yan J W 2021 Fundamental investigation of diamond cutting of micro V-shaped grooves on a polycrystalline soft-brittle material J. Manuf. Mater. Process. 517 |
Lee Y J, Senthil Kumar A and Wang H 2021 Beneficial stress of a coating on ductile-mode cutting of single-crystal brittle material Int. J. Mach. Tools Manuf. 168103787 |
Wang H, Riemer O, Rickens K and Brinksmeier E 2016 On the mechanism of asymmetric ductile–brittle transition in microcutting of (111) CaF2 single crystals Scr. Mater. 11421–26 |
Fang F Z and Xu F F 2018 Recent advances in micro/nano-cutting: effect of tool edge and material properties Nanomanuf. Metrol. 14–31 |
Rahman M A, Amrun M R, Rahman M and Kumar A S 2017 Variation of surface generation mechanisms in ultra-precision machining due to relative tool sharpness (RTS) and material properties Int. J. Mach. Tools Manuf. 11515–28 |
Xie W K and Fang F Z 2020 Effect of tool edge radius on material removal mechanism in atomic and close-to-atomic scale cutting Appl. Surf. Sci. 504144451 |
Yan J W, Zhao H W and Kuriyagawa T 2009 Effects of tool edge radius on ductile machining of silicon: an investigation by FEM Semicond. Sci. Technol. 24075018 |
Ameli Kalkhoran S N, Vahdati M and Yan J W 2020 Effect of relative tool sharpness on subsurface damage and material recovery in nanometric cutting of mono-crystalline silicon: a molecular dynamics approach Mater. Sci. Semicond. Process. 108104868 |
Fang F Z, Wu H and Liu Y C 2005 Modelling and experimental investigation on nanometric cutting of monocrystalline silicon Int. J. Mach. Tools Manuf. 451681–6 |
Chen M J, Jiang W B and Li M Q 2011 Effects of tool edge radius and rake angle on ductile machining process of CaF2 Int. J. Nanomanuf. 7350–60 |
Zhang S and Zong W J 2020 Micro defects on diamond tool cutting edge affecting the ductile-mode machining of KDP crystal Micromachines 111102 |
Liu Q, Liao Z R, Cheng J, Xu D D and Chen M J 2021 Mechanism of chip formation and surface-defects in orthogonal cutting of soft-brittle potassium dihydrogen phosphate crystals Mater. Des. 198109327 |
Yan J W, Asami T, Harada H and Kuriyagawa T 2012 Crystallographic effect on subsurface damage formation in silicon microcutting CIRP Ann. 61131–4 |
Chen X, Xu J F, Fang H S and Tian R J 2017 Influence of cutting parameters on the ductile-brittle transition of single-crystal calcium fluoride during ultra-precision cutting Int. J. Adv. Manuf. Technol. 89219–25 |
Zhang S, Zhang H J and Zong W J 2019 Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal J. Mater. Process. Technol. 273116259 |
Chen M J, Wang J H, Liang Y C and Yuan D Y 2007 Research on influence of the cutter rake angle to the surface quality during SPDT machining of crystal KDP Key Eng. Mater. 3391–5 |
Zhou T F, Ruan B S, Zhou J, Dong X B, Liang Z Q and Wang X B 2019 Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate Adv. Manuf. 7228–37 |
Fang F Z, Venkatesh V C and Zhang G X 2002 Diamond turning of soft semiconductors to obtain nanometric mirror surfaces Int. J. Adv. Manuf. Technol. 19637–41 |
Yan J W, Zhang Z Y, Kuriyagawa T and Gonda H 2010 Fabricating micro-structured surface by using single-crystalline diamond endmill Int. J. Adv. Manuf. Technol. 51957–64 |
Matsumura T 2018 Micro milling for functional surface Micro and Nano Fabrication Technology 1st edn ed J W Yan Micro/Nano Technologies (Singapore: Springer) pp 1–34 |
Chen N, Li H N, Wu J M, Li Z J, Li L, Liu G Y and He N 2021 Advances in micro milling: from tool fabrication to process outcomes Int. J. Mach. Tools Manuf. 160103670 |
Fang F Z, Wu H, Liu X D, Liu Y C and Ng S T 2003 Tool geometry study in micromachining J. Micromech. Microeng. 13726–31 |
Chen N, Chen M J, Wu C Y, Pei X D, Qian J and Reynaerts D 2017 Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal Int. J. Mech. Sci. 134387–98 |
Arif M, Rahman M and San W Y 2011 Ultraprecision ductile mode machining of glass by micromilling process J. Manuf. Process. 1350–59 |
Rusnaldy N, Ko T J and Kim H S 2007 Micro-end-milling of single-crystal silicon Int. J. Mach. Tools Manuf. 472111–9 |
Oliaei S N B and Karpat Y 2018 Polycrystalline diamond end mill cutting edge design to improve ductile-mode machining of silicon Precis. Eng. 51403–14 |
Xiao Y, Chen M J, Yang Y T and Cheng J 2015 Research on the critical condition of brittle-ductile transition about micro-milling of KDP crystal and experimental verification Int. J. Precis. Eng. Manuf. 16351–9 |
Ono T and Matsumura T 2008 Influence of tool inclination on brittle fracture in glass cutting with ball end mills J. Mater. Process. Technol. 20261–69 |
Foy K, Wei Z, Matsumura T and Huang Y 2009 Effect of tilt angle on cutting regime transition in glass micromilling Int. J. Mach. Tools Manuf. 49315–24 |
Aurich J C, Reichenbach I G and Schüler G M 2012 Manufacture and application of ultra-small micro end mills CIRP Ann. 6183–86 |
Choong Z J, Huo D H, Degenaar P and O’Neill A 2019 Micro-machinability and edge chipping mechanism studies on diamond micro-milling of monocrystalline silicon J. Manuf. Process. 3893–103 |
Huo D H, Lin C, Choong Z J, Pancholi K and Degenaar P 2015 Surface and subsurface characterisation in micro-milling of monocrystalline silicon Int. J. Adv. Manuf. Technol. 811319–31 |
Liu Q, Cheng J, Liao Z R, Yang H, Zhao L J and Chen M J 2019 Incident laser modulation by tool marks on micro-milled KDP crystal surface: numerical simulation and experimental verification Opt. Laser Technol. 119105610 |
Chen N, Chen M J, Guo Y Q and Wang X B 2015 Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill Int. J. Adv. Manuf. Technol. 78221–9 |
Spaeth M L et al 2016 Optics recycle loop strategy for NIF operations above UV laser-induced damage threshold Fusion Sci. Technol. 69265–94 |
Liu Q, Cheng J, Yang H, Xu Y F, Zhao L J, Tan C and Chen M J 2019 Modeling of residual tool mark formation and its influence on the optical performance of KH2PO4 optics repaired by micro-milling Opt. Mater. Express 93789–807 |
Ali M Y and Ong A S 2006 Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering Int. J. Adv. Manuf. Technol. 31501–8 |
Yan J W, Uchida K, Yoshihara N and Kuriyagawa T 2009 Fabrication of micro end mills by wire EDM and some micro cutting tests J. Micromech. Microeng. 19025004 |
Zhang Z Y, Peng H M and Yan J W 2013 Micro-cutting characteristics of EDM fabricated high-precision polycrystalline diamond tools Int. J. Mach. Tools Manuf. 6599–106 |
Chen N, Chen M J, Wu C Y and Pei X D 2017 Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness Precis. Eng. 50410–20 |
O’Toole L, Kang C W and Fang F Z 2021 Precision micro-milling process: state of the art Adv. Manuf. 9173–205 |
Chen N, Chen M J, Wu C Y, Guo Y Q and Wang Y N 2016 The design and optimization of micro polycrystalline diamond ball end mill for repairing micro-defects on the surface of KDP crystal Precis. Eng. 43345–55 |
Yan Y, Zhou P, Wang H P and Mao Y 2020 Thermal effect on poly(methyl methacrylate) (PMMA) material removal in the micromilling process Polymers 122122 |
Ali M Y, Khan A A, Mohamad Asharaf A B and Abdul Wahab A 2012 Prediction of minimum chip thickness in tool based micro end milling Int. J. Integr. Eng. 46–10(available at: https://publisher.uthm.edu.my/ojs/index. php/ijie/article/view/147) |
Son S M, Lim H S and Ahn J H 2005 Effects of the friction coefficient on the minimum cutting thickness in micro cutting Int. J. Mach. Tools Manuf. 45529–35 |
Chen N, Li L, Wu J M, Qian J, He N and Reynaerts D 2019 Research on the ploughing force in micro milling of soft-brittle crystals Int. J. Mech. Sci. 155315–22 |
Korkmaz E, Onler R and Ozdoganlar O B 2017 Micromilling of poly(methyl methacrylate, PMMA) using single-crystal diamond tools Proc. Manuf. 10683–93 |
Cheng X, Wang Z G, Nakamoto K and Yamazaki K 2010 Design and development of PCD micro straight edge end mills for micro/nano machining of hard and brittle materials J. Mech. Sci. Technol. 242261–8 |
Cheng X, Wang Z G, Nakamoto K and Yamazaki K 2009 Design and development of a micro polycrystalline diamond ball end mill for micro/nano freeform machining of hard and brittle materials J. Micromech. Microeng. 19115022 |
Uchiyama R, Inoue Y, Uchiyama F and Matsumura T 2021 Optimization in milling of polymer materials for high quality surfaces Int. J. Autom. Technol. 15512–20 |
Ko T J, Kim H S and Lee S S 2001 Selection of the machining inclination angle in high-speed ball end milling Int. J. Adv. Manuf. Technol. 17163–70 |
Liu Q, Cheng J, Xiao Y, Yang H and Chen M J 2018 Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling Proc. CIRP 71260–6 |
Liu Q, Cheng J, Xiao Y, Chen M J, Yang H and Wang J H 2018 Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling Int. J. Adv. Manuf. Technol. 992777–88 |
Matsumura T and Ono T 2008 Cutting process of glass with inclined ball end mill J. Mater. Process. Technol. 200356–63 |
Zhang Z Y, Yan J W and Kuriyagawa T 2019 Manufacturing technologies toward extreme precision Int. J. Extreme Manuf. 1022001 |
Namba Y, Yoshida K, Yoshida H and Nakai S 1998 Ultraprecision grinding of optical materials for high-power lasers Proc. SPIE 3244320–30 |
Katagiri M and Namba Y 1999 Optical surface generation of KDP inorganic nonlinear optical crystals by ultraprecision surface grinding J. Japan Soc. Precis. Eng. 65888–92 |
Qu M N, Jin T, Xie G Z and Cai R 2020 Developing a novel binderless diamond grinding wheel with femtosecond laser ablation and evaluating its performance in grinding soft and brittle materials J. Mater. Process. Technol. 275116359 |
Qu M N, Jin T, Xie G Z, Cai R and Lu A G 2020 Design of binderless grinding wheel with positive rake angle and fabrication used femtosecond laser ablation for grinding soft and brittle crystals Opt. Lasers Eng. 124105803 |
Wang Q G, Gao H, Zhang Q Z, Cao X S and Kang R K 2008 Experimental researches on precision grinding of KDP crystal Key Eng. Mater. 359–360113–7 |
Namba Y, Yoshida T, Yoshida S, Yoshida K and Iwata K 2005 Surfaces of calcium fluoride single crystals ground with an ultra-precision surface grinder CIRP Ann. 54503–6 |
Zhang Z Y, Meng Y W, Guo D M, Wu L L, Tian Y J and Liu R P 2010 Material removal mechanism of precision grinding of soft-brittle CdZnTe wafers Int. J. Adv. Manuf. Technol. 46563–9 |
Zhang Z Y, Wu Y Q and Huang H 2010 New deformation mechanism of soft-brittle CdZnTe single crystals under nanogrinding Scr. Mater. 63621–4 |
Wang Y, Zou J, Huang H, Zhou L, Wang B L and Wu Y Q 2007 Formation mechanism of nanocrystalline high-pressure phases in silicon during nanogrinding Nanotechnology 18465705 |
Gao S, Wu Y Q, Kang R K and Huang H 2018 Nanogrinding induced surface and deformation mechanism of single crystal β-Ga2O3 Mater. Sci. Semicond. Process. 79165–70 |
Zhang Z Y, Zhang X Z, Xu C G and Guo D M 2013 Characterization of nanoscale chips and a novel model for face nanogrinding on soft-brittle HgCdTe films Tribol. Lett. 49203–15 |
Zhang Z Y, Song Y X, Xu C G and Guo D M 2012 A novel model for undeformed nanometer chips of soft-brittle HgCdTe films induced by ultrafine diamond grits Scr. Mater. 67197–200 |
Zhang Z Y, Song Y X, Huo F W and Guo D M 2012 Nanoscale material removal mechanism of soft-brittle HgCdTe single crystals under nanogrinding by ultrafine diamond grits Tribol. Lett. 4695–100 |
Lawn B 1993 Fracture of Brittle Solids 2nd edn (Cambridge: Cambridge University Press) |
Suratwala T, Steele R, Shen N, Ray N, Wong L, Miller P E and Feit M 2020 Lateral cracks during sliding indentation on various optical materials J. Am. Ceram. Soc. 1031343–57 |
Hou N, Zhang Y, Zhang L C and Wang M H 2021 Material removal mechanisms and characteristics of potassium dihydrogen phosphate crystals under nanoscratching Adv. Manuf. 9558–67 |
Zhang Y, Zhang L C, Liu M, Zhang F H, Mylvaganam K and Liu W D 2015 Understanding the friction and wear of KDP crystals by nanoscratching Wear 332–333900–6 |
Rahaman M L and Zhang L C 2021 An investigation on the friction, wear and deformation of potassium dihydrogen phosphate Wear 476203624 |
Li C, Zhang Y, Zhou G Z, Wei Z J and Zhang L C 2020 Theoretical modelling of brittle-to-ductile transition load of KDP crystals on (001) plane during nanoindentation and nanoscratch tests J. Mater. Res. Technol. 914142–57 |
Axinte D, Butler-Smith P, Akgun C and Kolluru K 2013 On the influence of single grit micro-geometry on grinding behavior of ductile and brittle materials Int. J. Mach. Tools Manuf. 7412–18 |
Zhou H X, Qiu S, Zhang X Z and Xu C G 2012 Mechanical characteristics of soft-brittle HgCdTe single crystals investigated using nanoindentation and nanoscratching Appl. Surf. Sci. 2589756–61 |
Li Y, Kang R K, Gao H and Wu D J 2010 Effect of mechanical anisotropy on grinding of CdZnTe wafers Mater. Manuf. Process. 25412–7 |
Yang S Y, Zhang L C and Wu Z H 2021 An investigation on the nano-abrasion wear mechanisms of KDP crystals Wear 476203692 |
Yang S Y, Zhang L C, Xie H T and Liu W D 2021 Interaction potential function for the deformation analysis of potassium dihydrogen phosphate using molecular dynamics simulation Comput. Mater. Sci. 187110122 |
Zhang C L, Feng P F and Wang D 2012 The effect of crystallographic orientation on material removal behavior of (001) plane KDP crystal in nano-scratch test Proc. ASME 2012 Int. Mechanical Engineering Congress and Exposition. Volume 3: Design, Materials and Manufacturing, Parts A, B, and C (Houston, Texas, USA, 9–15 November 2012) (New York: ASME) pp 1883–9 |
Liu Q, Liao Z R and Axinte D 2020 Temperature effect on the material removal mechanism of soft-brittle crystals at nano/micron scale Int. J. Mach. Tools Manuf. 159103620 |
Chen L, Hu L C, Xiao C, Qi Y Q, Yu B J and Qian L M 2017 Effect of crystallographic orientation on mechanical removal of CaF2 Wear 376–377409–16 |
Wu Y Q, Huang H and Zou J 2011 Transmission electron microscopy characterization of the deformation of CdZnTe single crystals induced by nanoscratching Scr. Mater. 65392–5 |
Huang W H and Yan J W 2021 Deformation behaviour of soft-brittle polycrystalline materials determined by nanoscratching with a sharp indenter Precis. Eng. 72717–29 |
Zhang S H, Guo X G, Jin Z J, Kang R K and Guo D M 2020 Material removal characteristics of precorroded Lu2O3 laser crystals and elastic deformation model during nanoscratch process Tribol. Int. 143106027 |
Huang L, Bonifacio C, Song D, Benthem K V, Mukherjee A K and Schoenung J M 2011 Investigation into the microstructure evolution caused by nanoscratch-induced room temperature deformation in M-plane sapphire Acta Mater. 595181–93 |
Li C, Zhang F H, Wu Y Q and Zhang X 2018 Influence of strain rate effect on material removal and deformation mechanism based on ductile nanoscratch tests of Lu2O3 single crystal Ceram. Int. 4421486–98 |
Li C, Zhang F H and Piao Y 2019 Strain-rate dependence of surface/subsurface deformation mechanisms during nanoscratching tests of GGG single crystal Ceram. Int. 4515015–24 |
LTS Research Laboratories, Inc 2021 Safety data sheet cadmium zinc tellurium (available at: www.ltschem.com/ msds/CdZnTe.pdf) |
National Center for Biotechnology Information 2022 PubChem compound summary for CID 62670, barium fluoride (available at: https://pubchem.ncbi.nlm.nih.gov/ compound/Barium-fluoride) |
National Center for Biotechnology Information 2022 PubChem compound summary for CID 4298215, zinc selenide (ZnSe) (available at: https://pubchem.ncbi.nlm. nih.gov/compound/Zinc-selenide-_ZnSe) |
National Center for Biotechnology Information 2022 PubChem compound summary for CID 516951, potassium dihydrogen phosphate (available at: https:// pubchem.ncbi.nlm.nih.gov/compound/516951) |
National Center for Biotechnology Information 2022 PubChem compound summary for CID 84512, calcium fluoride (available at: https://pubchem.ncbi.nlm.nih.gov/ compound/Calcium-fluoride) |
National Center for Biotechnology Information 2022 PubChem compound summary for CID 14821, zinc sulfide (available at: https://pubchem.ncbi.nlm.nih.gov/ compound/ZINC-sulfide) |
Korzynski M 2007 Modeling and experimental validation of the force-surface roughness relation for smoothing burnishing with a spherical tool Int. J. Mach. Tools Manuf. 471956–64 |
Korzynski M, Lubas J, Swirad S and Dudek K 2011 Surface layer characteristics due to slide diamond burnishing with a cylindrical-ended tool J. Mater. Process. Technol. 21184–94 |
Li F L, Xia W, Zhou Z Y, Zhao J and Tang Z Q 2012 Analytical prediction and experimental verification of surface roughness during the burnishing process Int. J. Mach. Tools Manuf. 6267–75 |
Teramachi A and Yan J W 2019 Improving the surface integrity of additive-manufactured metal parts by ultrasonic vibration-assisted burnishing J. Micro Nano-Manuf. 7024501 |
Chueca De Bruijn A, Gómez-Gras G and Pérez M A 2021 On the effect upon the surface finish and mechanical performance of ball burnishing process on fused filament fabricated parts Addit. Manuf. 46102133 |
Attabi S, Himour A, Laouar L and Motallebzadeh A 2021 Mechanical and wear behaviors of 316L stainless steel after ball burnishing treatment J. Mater. Res. Technol. 153255–67 |
Huang W H and Yan J W 2021 Chip-free surface patterning of toxic brittle polycrystalline materials through micro/nanoscale burnishing Int. J. Mach. Tools Manuf. 162103688 |
Pu C, Dai L D, Li H P, Hu H Y, Liu K X, Yang L F and Hong M L 2019 Pressure-induced phase transitions of ZnSe under different pressure environments AIP Adv. 9025004 |
Lai M, Zhang X D, Fang F Z and Bi M H 2017 Fundamental investigation on partially overlapped nano-cutting of monocrystalline germanium Precis. Eng. 49160–8 |
Wang J S, Fang F Z and Zhang X D 2015 An experimental study of cutting performance on monocrystalline germanium after ion implantation Precis. Eng. 39220–3 |
Fang F Z, Lai M, Wang J S, Luo X C, Yan J W and Yan Y D 2022 Nanometric cutting: mechanisms, practices and future perspectives Int. J. Mach. Tools Manuf. 178103905 |
Xu W H et al 2022 Electrostatic atomization minimum quantity lubrication machining: from mechanism to application Int. J. Extreme Manuf. 4042003 |
Kozlowski M R, Thomas I M, Edwards G J, Stanion K A, Fuchs B A and Latanich L 1991 Influence of diamond turning and surface cleaning processes on the degradation of KDP crystal surfaces Proc. SPIE 156159–69 |
Montesanti R C and Thompson S L 1995 A procedure for diamond turning KDP crystals USDOE Economic Regulatory Administration (Washington, DC) (https://doi. org/10.2172/105024) |
Li L H, Wong H C and Lee R B 2020 Evaluation of a novel nanodroplet cutting fluid for diamond turning of optical polymers Polymers 122213 |
Tie G, Dai Y F, Guan C L, Zhu D C and Song B 2013 Research on full-aperture ductile cutting of KDP crystals using spiral turning technique J. Mater. Process. Technol. 2132137–44 |