Scipioni L, Stern L A, Notte J, Sijbrandij S and Griffin B 2008 Helium ion microscope Adv. Mater. Processes 16627-30 |
Cohen-Tanugi D and Yao N 2008 Superior imaging resolution in scanning helium-ion microscopy:a look at beam-sample interactions J. Appl. Phys. 104063504 |
Zahid O K and Hall A R 2016 Helium ion microscope fabrication of solid-state nanopore devices for biomolecule analysis Helium Ion Microscopy, ed G Hlawacek and A Gölzhäuser (Berlin:Springer) pp 447-70 |
Hill R, Notte J A and Scipioni L 2012 Scanning helium ion microscopy Adv. Imaging Electron Phys. 17065-148 |
Tan S D and Livengood R 2016 Applications of GFIS in semiconductors Helium Ion Microscopy, ed G Hlawacek and A Gölzhäuser (Berlin:Springer) pp 471-98 |
Scipioni L, Alkemade P, Sidorkin V, Chen P, Maas D and van Veldhoven E 2009 The helium ion microscope:advances in technology and applications Am. Lab. 4126-8 |
Boden S A, Asadollahbaik A, Rutt H N and Bagnall D M 2012 Helium ion microscopy of Lepidoptera scales Scanning 34107-20 |
Alkemade P F A and van Veldhoven E 2012 Deposition, milling, and etching with a focused helium ion beam Nanofabrication eds M Stepanova and S Dew (Berlin:Springer) pp 275-300 |
Shorubalko I, Pillatsch L and Utke I 2016 Direct-write milling and deposition with noble gases Helium Ion Microscopy, ed G Hlawacek and A Gölzhäuser (Berlin:Springer) pp 355-93 |
Yang J J, Ferranti D C, Stern L A, Sanford C A, Huang J, Ren Z, Qin L C and Hall A R 2011 Rapid and precise scanning helium ion microscope milling of solid-state nanopores for biomolecule detection Nanotechnology 22285310 |
Sawafta F, Clancy B, Carlsen A T, Huber M and Hall A R 2014 Solid-state nanopores and nanopore arrays optimized for optical detection Nanoscale 66991-6 |
Emmrich D, Beyer A, Nadzeyka A, Bauerdick S, Meyer J C, Kotakoski J and Gölzhäuser A 2016 Nanopore fabrication and characterization by helium ion microscopy Appl. Phys. Lett. 108163103 |
Lemme M C, Bell D C, Williams J R, Stern L A, Baugher B W H, Jarillo-Herrero P and Marcus C M 2009 Etching of graphene devices with a helium ion beam ACS Nano 32674-6 |
Xia D Y, Huynh C, McVey S, Kobler A, Stern L, Yuan Z S and Ling X S 2018 Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope Nanoscale 105198-204 |
Deng Y S, Huang Q M, Zhao Y, Zhou D M, Ying C F and Wang D Q 2016 Precise fabrication of a 5 nm graphene nanopore with a helium ion microscope for biomolecule detection Nanotechnology 28045302 |
Wang H T, Xie W Y, Wang Y J, Zhu J F, Liu M W, Lu W Q, Deng Y S, Wang G D and Wang D Q 2018 Fabrication of 3D nanovolcano-shaped nanopores with helium ion microscopy J. Vac. Sci. Technol. B 36011603 |
Alkemade P F A and Miro H 2014 Focused helium-ion-beam-induced deposition Appl. Phys. A 1171727-47 |
Utke I, Hoffmann P and Melngailis J 2008 Gas-assisted focused electron beam and ion beam processing and fabrication J. Vac. Sci. Technol. B 261197-276 |
Drezner Y, Greenzweig Y, Fishman D, van Veldhoven E, Maas D J, Raveh A and Livengood R H 2012 Structural characterization of He ion microscope platinum deposition and sub-surface silicon damage J. Vac. Sci. Technol. B 30041210 |
Shi X Q and Boden S A 2016 Scanning helium ion beam lithography Front. Nanosci. 11563-94 |
Nanda G, Hlawacek G, Goswami S, Watanabe K and Taniguchi T 2017 Alkemade P F A. Electronic transport in helium-ion-beam etched encapsulated graphene nanoribbons Carbon 119419-25 |
Abbas A N, Liu G, Liu B L, Zhang L Y, Liu H, Ohlberg D, Wu W and Zhou C W 2014 Patterning, characterization, and chemical sensing applications of graphene nanoribbon arrays down to 5 nm using helium ion beam lithography ACS Nano 81538-46 |
Kollmann H et al 2014 Toward plasmonics with nanometer precision:nonlinear optics of helium-ion milled gold nanoantennas Nano Lett. 144778-84 |
Scholder O, Jefimovs K, Shorubalko I, Hafner C, Sennhauser U and Bona G L 2013 Helium focused ion beam fabricated plasmonic antennas with sub-5 nm gaps Nanotechnology 24395301 |
Reimer L 2000 Scanning electron microscopy:physics of image formation and microanalysis, second edition Meas. Sci. Technol. 111826 |
Arey B W, Shutthanandan V and Jiang W 2010 Helium Ion Microscopy Versus Scanning Electron Microscopy (New York:Wiley) |
Bell D C 2009 Contrast mechanisms and image formation in helium ion microscopy Microsc. Microanal. 15147-53 |
Hlawacek G, Veligura V, van Gastel R and Poelsema B 2014 Helium ion microscopy J. Vac. Sci. Technol. B 32020801 |
Scipioni L, Sanford C A, Notte J, Thompson B and McVey S 2009 Understanding imaging modes in the helium ion microscope J. Vac. Sci. Technol. B 273250-5 |
Wirtz T, De Castro O, Audinot J N and Philipp P 2019 Imaging and analytics on the helium ion microscope Annu. Rev. Anal. Chem. 12523-43 |
Ward B W, Notte J A and Economou N P 2006 Helium ion microscope:a new tool for nanoscale microscopy and metrology J. Vac. Sci. Technol. B 242871-4 |
Gölzhäuser A and Hlawacek G 2016 HIM of biological samples Helium Ion Microscopy, ed G Hlawacek and A Gölzhäuser (Berlin:Springer) pp 173-85 |
Bazou D, Behan G, Reid C, Boland J J and Zhang H Z 2011 Imaging of human colon cancer cells using He-Ion scanning microscopy J. Microsc. 242290-4 |
Vanden Berg-Foels W S, Scipioni L, Huynh C and Wen X 2012 Helium ion microscopy for high-resolution visualization of the articular cartilage collagen network J. Microsc. 246168-76 |
Joens M S et al 2013 Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution Sci. Rep. 33514 |
Boseman A, Nowlin K, Ashraf S, Yang J J and LaJeunesse D 2013 Ultrastructural analysis of wild type and mutant Drosophila melanogaster using helium ion microscopy Micron 5126-35 |
Rice W L, van Hoek A N, Păunescu T G, Huynh C, Goetze B, Singh B, Scipioni L, Stern L A and Brown D 2013 High resolution helium ion scanning microscopy of the rat kidney PloS One 8 e57051 |
Leppänen M, Sundberg L R, Laanto E, de Freitas Almeida G M, Papponen P and Maasilta I J 2017 Imaging bacterial colonies and phage-bacterium interaction at sub-nanometer resolution using helium-ion microscopy Adv. Biosyst. 11700070 |
Dykas M M, Poddar K, Yoong S L, Viswanathan V, Mathew S, Patra A, Saha S, Pastorin G and Venkatesan T 2018 Enhancing image contrast of carbon nanotubes on cellular background using helium ion microscope by varying helium ion fluence J. Microsc. 26914-22 |
Iberi V, Vlassiouk I, Zhang X G, Matola B, Linn A, Joy D C and Rondinone A J 2015 Maskless lithography and in situ visualization of conductivity of graphene using helium ion microscopy Sci. Rep. 511952 |
Sakai C, Ishida N, Masuda H, Nagano S, Kitahara M, Ogata Y and Fujita D 2016 Active voltage contrast imaging of cross-sectional surface of multilayer ceramic capacitor using helium ion microscopy Appl. Phys. Lett. 109051603 |
Sakai C, Ishida N, Nagano S, Onishi K and Fujita D 2018 In situ voltage-application system for active voltage contrast imaging in helium ion microscope J. Vac. Sci. Technol. B 36042903 |
Xia D Y, McVey S, Huynh C and Kuehn W 2019 Defect localization and nanofabrication for conductive structures with voltage contrast in helium ion microscopy ACS Appl. Mater. Interfaces 115509-16 |
Xia D Y, McVey S and Kuehn W 2019 Defect localization and electrical fault isolation for metal connection using helium ion microscope Proc. 2019 Int. Symp. on VLSI Technology, Systems and Application (IEEE, Hsinchu, China) pp 1-2 |
Hlawacek G, Jankowski M, Wormeester H, van Gastel R, Zandvliet H J W and Poelsema B 2016 Visualization of steps and surface reconstructions in Helium Ion Microscopy with atomic precision Ultramicroscopy 16217-24 |
Jepson M A E, Inkson B J, Liu X, Scipioni L and Rodenburg C 2009 Quantitative dopant contrast in the helium ion microscope EPL 8626005 |
Jepson M A E, Inkson B J, Rodenburg C and Bell D C 2009 Dopant contrast in the helium ion microscope EPL 8546001 |
Hlawacek G, Veligura V, Lorbek S, Mocking T F, George A, van Gastel R, Zandvliet H J W and Poelsema B 2012 Imaging ultra thin layers with helium ion microscopy:utilizing the channeling contrast mechanism Beilstein J. Nanotechnol. 3507-12 |
Hall A R 2013 In situ thickness assessment during ion milling of a free-standing membrane using transmission helium ion microscopy Microsc. Microanal. 19740-4 |
Guo H X, Itoh H, Wang C M, Zhang H and Fujita D 2014 Focal depth measurement of scanning helium ion microscope Appl. Phys. Lett. 105023105 |
Huang Z, W D L, Santori C, Acosta V M, Faraon A, Ishikawa T, Wu W, Winston D, Williams R S and Beausoleil R G 2013 Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing Appl. Phys. Lett. 103081906 |
Livengood R, Tan S D, Greenzweig Y, Notte J and McVey S 2009 Subsurface damage from helium ions as a function of dose, beam energy, and dose rate J. Vac. Sci. Technol. B 273244-9 |
Wasfi A, Awwad F and Ayesh A I 2018 Graphene-based nanopore approaches for DNA sequencing:a literature review Biosens. Bioelectron. 119191-203 |
Marshall M M, Yang J J and Hall A R 2012 Direct and transmission milling of suspended silicon nitride membranes with a focused helium ion beam Scanning 34101-6 |
Carlsen A T, Briggs K, Hall A R and Tabard-Cossa V 2017 Solid-state nanopore localization by controlled breakdown of selectively thinned membranes Nanotechnology 28085304 |
Sawafta F, Carlsen A T and Hall A R 2014 Membrane thickness dependence of nanopore formation with a focused helium ion beam Sensors 148150-61 |
Chen D X et al 2019 Sub-10 nm stable graphene quantum dots embedded in hexagonal boron nitride Nanoscale 114226-30 |
Knust S, Kreft D, Hillmann R, Meyer A, Viefhues M, Reimann P and Anselmetti D 2017 Measuring DNA translocation forces through MoS2-nanopores with optical tweezers Mater. Today Proc. 4 S168-S173 |
Hayashi T, Arima K, Yamashita N, Park S, Ma Z P, Tabata O and Kawai K 2018 Nanopore fabrication of two-dimensional materials on SiO2 membranes using he ion microscopy IEEE Trans. Nanotechnol. 17727-30 |
Fox D, Zhou Y B, O'Neill A, Kumar S, Wang J J, Coleman J N, Duesberg G S, Donegan J F and Zhang H Z 2013 Helium ion microscopy of graphene:beam damage, image quality and edge contrast Nanotechnology 24335702 |
Buchheim J, Wyss R M, Shorubalko I and Park H G 2016 Understanding the interaction between energetic ions and freestanding graphene towards practical 2D perforation Nanoscale 88345-54 |
Cantley L et al 2019 Voltage gated inter-cation selective ion channels from graphene nanopores Nanoscale 119856-61 |
Schmidt M E, Iwasaki T, Muruganathan M, Haque M, van Ngoc H, Ogawa S and Mizuta H 2018 Structurally controlled large-area 10 nm pitch graphene nanomesh by focused helium ion beam milling ACS Appl. Mater. Interfaces 1010362-8 |
Zhang L, Heinig N F, Bazargan S, Abd-Ellah M, Moghimi N and Leung K T 2015 Direct-write three-dimensional nanofabrication of nanopyramids and nanocones on Si by nanotumefaction using a helium ion microscope Nanotechnology 26255303 |
Córdoba R, Ibarra A and Mailly D 2018 de Teresa J M. Vertical growth of superconducting crystalline hollow nanowires by He+ focused ion beam induced deposition Nano Lett. 181379-86 |
Lee C L, Chien S W, Chen S Y, Liu C H, Tsai K Y, Li J H, Shew B Y, Hong C S and Lee C T 2017 Fabrication of metrology test structures with helium ion beam direct write Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI (SPIE, San Jose, CA, USA) p 1014519 |
Lee C L, Cai J S, Chien S W and Tsai K Y 2019 Precision fabrication of EUVL programmed defects with helium ion beam lithography Proc. SPIE 11147, Int. Conf. on Extreme Ultraviolet Lithography 2019(SPIE, Monterey, CA, USA) p 111471J |
Scipioni L, Ferranti D C, Smentkowski V S and Potyrailo R A 2010 Fabrication and initial characterization of ultrahigh aspect ratio vias in gold using the helium ion microscope J. Vac. Sci. Technol. B 28 C6P18-23 |
Giri P K, Raineri V, Franzo G and Rimini E 2001 Mechanism of swelling in low-energy ion-irradiated silicon Phys. Rev. B 65012110 |
Giri P K 2005 Studies on the surface swelling of ion-irradiated silicon:role of defects Mater. Sci. Eng. B 121238-43 |
Leclerc S, Declémy A, Beaufort M F, Tromas C and Barbot J F 2005 Swelling of SiC under helium implantation J. Phys. D:Appl. Phys. 98113506 |
Tseng A A 2005 Recent developments in nanofabrication using focused ion beams Small 1924-39 |
Mitsui T, Stein D, Kim Y R, Hoogerheide D and Golovchenko J A 2006 Nanoscale volcanoes:accretion of matter at ion-sculpted nanopores Phys. Rev. Lett. 96036102 |
Livengood R H, Greenzweig Y, Liang T and Grumski M 2007 Helium ion microscope invasiveness and imaging study for semiconductor applications J. Vac. Sci. Technol. B 252547-52 |
Sanford C A, Stern L, Barriss L, Farkas L, DiManna M, Mello R, Maas D J and Alkemade P F 2009 Beam induced deposition of platinum using a helium ion microscope J. Vac. Sci. Technol. B 272660-7 |
Alkemade P F A, Chen P, van Veldhoven E and Maas D 2010 Model for nanopillar growth by focused helium ion-beam-induced deposition J. Vac. Sci. Technol. B 28 C6F22-C6F25 |
Wu H M, Stern L A, Chen J H, Huth M, Schwalb C H, Winhold M, Porrati F, Gonzalez C M, Timilsina R and Rack P D 2013 Synthesis of nanowires via helium and neon focused ion beam induced deposition with the gas field ion microscope Nanotechnology 24175302 |
Alkemade P F A, Miro H, van Veldhoven E, Maas D J, Smith D A and Rack P D 2011 Pulsed helium ion beam induced deposition:a means to high growth rates J. Vac. Sci. Technol. B 2906FG05 |
Yang P S, Huang Z D, Huang K W and Chen M J 2020 Selective growth of platinum nanolines by helium ion beam induced deposition and atomic layer deposition Ultramicroscopy 211112952 |
Timilsina R, Smith D A and Rack P D 2013 A comparison of neon versus helium ion beam induced deposition via Monte Carlo simulations Nanotechnology 24115302 |
Smith D A, Joy D C and Rack P D 2010 Monte Carlo simulation of focused helium ion beam induced deposition Nanotechnology 21175302 |
Chen P, van Veldhoven E, Sanford C A, Salemink H W M, Maas D J, Smith D A, Rack P D and Alkemade P F A 2010 Nanopillar growth by focused helium ion-beam-induced deposition Nanotechnology 21455302 |
Kohama K, Iijima T, Hayashida M and Ogawa S 2013 Tungsten-based pillar deposition by helium ion microscope and beam-induced substrate damage J. Vac. Sci. Technol. B 31031802 |
Wu H, Stern L A, Xia D, Ferranti D, Thompson B, Klein K L, Gonzalez C M and Rack P D 2014 Focused helium ion beam deposited low resistivity cobalt metal lines with 10 nm resolution:implications for advanced circuit editing J. Mater. Sci. Mater. Electron. 25587-95 |
Boden S A, Moktadir Z, Bagnall D M, Mizuta H and Rutt H N 2011 Focused helium ion beam milling and deposition Microelectron. Eng. 882452-5 |
Basset J et al 2019 High kinetic inductance microwave resonators made by He-Beam assisted deposition of tungsten nanowires Appl. Phys. Lett. 114102601 |
Cérdoba R, Mailly D, Rezaev R O, Smirnova E I, Schmidt O G, Fomin V M, Zeitler U, Guillamén I, Suderow H and de Teresa J M 2019 Three-dimensional superconducting nanohelices grown by He+-focused-ion-beam direct writing Nano Lett. 198597-604 |
Horák M, Bukvišová K, Švarc V, Jaskowiec J, Křápek V and Šikola T 2018 Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography Sci. Rep. 89640 |
Winston D et al 2009 Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist J. Vac. Sci. Technol. B 272702-6 |
Ruchhoeft P and Wolfe J C 2000 Determination of resist exposure parameters in helium ion beam lithography:absorbed energy gradient, contrast, and critical dose J. Vac. Sci. Technol. B 183177-80 |
Kalhor N and Alkemade P F A 2016 Resist assisted patterning Helium Ion Microscopy, ed G Hlawacek and A Gölzhäuser (Berlin:Springer) pp 395-414 |
Li W D, Wu W and Williams R S 2012 Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns J. Vac. Sci. Technol. B 3006F304 |
Shi X Q, Prewett P, Huq E, Bagnall D M, Robinson A P G and Boden S A 2016 Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning Microelectron. Eng. 15574-78 |
Cattoni A, Mailly D, Dalstein O, Faustini M, Seniutinas G, Rösner B and David C 2018 Sub-10 nm electron and helium ion beam lithography using a recently developed alumina resist Microelectron. Eng. 19318-22 |
Lewis S M et al 2019 Plasma-etched pattern transfer of sub-10 nm structures using a metal-organic resist and helium ion beam lithography Nano Lett. 196043-8 |
Kumar R, Chauhan M, Moinuddin M G, Sharma S K and Gonsalves K E 2020 Development of nickel-based negative tone metal oxide cluster resists for sub-10 nm electron beam and helium ion beam lithography ACS Appl. Mater. Interfaces 1219616-24 |
Flatabø R, Agarwal A, Hobbs R, Greve M M, Holst B and Berggren K K 2018 Exploring proximity effects and large depth of field in helium ion beam lithography:large-area dense patterns and tilted surface exposure Nanotechnology 29275301 |
Cai J X, Zhu Z Y, Alkemade P F A, van Veldhoven E, Wang Q J, Ge H X, Rodrigues S P, Cai W S and Li W D 20183D volumetric energy deposition of focused helium ion beam lithography:visualization, modeling, and applications in nanofabrication Adv. Mater. Interfaces 51800203 |
Naitou Y, Iijima T and Ogawa S 2015 Direct nano-patterning of graphene with helium ion beams Appl. Phys. Lett. 106033103 |
Archanjo B S, Fragneaud B, Cançado L C, Winston D, Miao F, Achete C A and Medeiros-Ribeiro G 2014 Graphene nanoribbon superlattices fabricated via He ion lithography Appl. Phys. Lett. 104193114 |
Jiang X J, Cai W, Luo W W, Xiang Y X, Zhang N, Ren M X, Zhang X Z and Xu J J 2018 Near-field imaging of graphene triangles patterned by helium ion lithography Nanotechnology 29385205 |
Bell D C, Lemme M C, Stern L A, Williams J R and Marcus C M 2009 Precision cutting and patterning of graphene with helium ions Nanotechnology 20455301 |
Hang S, Moktadir Z, Kalhor N, Saito S and Mizuta H 2013 Direct helium ion milling technology:towards the fabrication of extremely down-scaled graphene nanodevices Proc. 2013 IEEE Silicon Nanoelectronics Workshop (IEEE, Kyoto, Japan) |
Melli M, Polyakov A, Gargas D, Huynh C, Scipioni L, Bao W, Ogletree D F, Schuck P J, Cabrini S and Weber-Bargioni A 2013 Reaching the theoretical resonance quality factor limit in coaxial plasmonic nanoresonators fabricated by helium ion lithography Nano Lett. 132687-91 |
Kollmann H et al Ultrafast third-harmonic spectroscopy of single nanoantennas fabricated using helium-ion beam lithography 2016 Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX (SPIE, San Francisco, CA, USA) |
Laible F, Dreser C, Kern D P and Fleischer M 2019 Time-effective strategies for the fabrication of poly-and single-crystalline gold nano-structures by focused helium ion beam milling Nanotechnology 30235302 |
Seitl L, Laible F, Dickreuter S, Gollmer D A, Kern D P and Fleischer M 2019 Miniaturized fractal optical nanoantennas defined by focused helium ion beam milling Nanotechnology 31075301 |
Hahn C, Hajebifard A and Berini P 2020 Helium focused ion beam direct milling of plasmonic heptamer-arranged nanohole arrays Nanophotonics 9393-9 |
Wang Y D, Abb M, Boden S A, Aizpurua J, de Groot C H and Muskens O L 2013 Ultrafast nonlinear control of progressively loaded, single plasmonic nanoantennas fabricated using helium ion milling Nano Lett. 135647-53 |
Chen Y Q, Bi K X, Wang Q J, Zheng M J, Liu Q, Han Y X, Yang J B, Chang S L, Zhang G H and Duan H G 2016 Rapid focused ion beam milling based fabrication of plasmonic nanoparticles and assemblies via ‘sketch and peel’ strategy ACS Nano 1011228-36 |
Chen Y Q, Hu Y Q, Zhao J Y, Deng Y S, Wang Z L, Cheng X, Lei D Y, Deng Y B and Duan H G 2020 Topology optimization-based inverse design of plasmonic nanodimer with maximum near-field enhancement Adv. Funct. Mater. 302000642 |