Nakata Y, Hayashi1 E, Tsubakimoto K, Miyanaga N, Narazaki A, Shoji T, Tsuboi Y. 2020. Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer. Int. J. Extrem. Manuf. 2, 025101.
Citation:
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Nakata Y, Hayashi1 E, Tsubakimoto K, Miyanaga N, Narazaki A, Shoji T, Tsuboi Y. 2020. Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer. Int. J. Extrem. Manuf. 2, 025101.
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Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer
More Information
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1 Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan
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2 Institute for Laser Technology, 1-8-4 Utsubo-honmachi, Nishi-ku, Osaka 550-0004, Japan
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3 National Institute of Advanced Industrial Science and Technology, Chuo 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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4 Department of Chemistry, Osaka City University, 3-3-138, Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
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Abstract
Laser-induced forward transfer (LIFT) is a direct-writing technique capable of depositing a single dot smaller than the laser wavelength at small shot energy through the laser-induced dot transfer (LIDT) technique. To deposit a single nanodot in a single shot of laser irradiation, a liquid nanodrop is transferred from donor to receiver and finally solidified via a solid–liquid–solid (SLS) process. In conventional LIDT experiments, multi-shots with step scanning have been used to form array structures. However, interference laser processing can achieve an arrayed process and generate a periodic structure in a single shot. In this study, a femtosecond laser interference pattern was first applied to LIDT, and an array of nanodots was successfully deposited in a single shot, producing the following unit structures: a single dot, adjoining dots, and stacking dots. The diameter of the smallest nanodot was 355 nm, and the narrowest gap between two adjoining nanodots was 17.2 nm. The LIDT technique produces high-purity, catalyst-free that do not require post-cleaning or alignment processes. Given these significant advantages, LIDT can expand the usability of nanodots in a wide range of fields.
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Keywords
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Author Introduction
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Prof. Yoshiki NAKATA received his M.S. and Ph. D. from Kyushu University, Fukuoka, Japan, in 1994 and 1996, respectively. Since 1996 he joined the Graduate school of Information Science and Electrical Engineering, Kyushu University, Fukuoka, Japan, as a research associate. Since 2006 he joined the Institute of Laser Engineering (ILE), Osaka University, Osaka, Japan, as an associate professor. His research interests are material processing by laser, laser spectroscopy, fabrication of nanomaterials and their applications in opto-electronics, spatio-temporal control of a laser beam. He is a recipient of the Laser Society of Japan (LSJ) award for distinguished achievements in research (2011), LSJ award for research encouragement (2005), the 4th Funai information Technology Incentive Award, etc.. He is a member of The Japan Society of Applied Physics (JSAP), The Institute of Electrical Engineering of Japan (IEEJ), LSJ, and a senior member of The International Society for Optics and Photonics (SPIE).
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