Qin L et al 20205 nm nanogap electrodes and arrays by super-resolution laser lithography Nano Lett. 204916–23 |
Saha S K, Wang D E, Nguyen V H, Chang Y N, Oakdale J S and Chen S C 2019 Scalable submicrometer additive manufacturing Science 366105–9 |
Chen Y and Xiong S S 2020 Directed self-assembly of block copolymers for sub-10 nm fabrication Int. J. Extreme Manuf. 2032006 |
Kerse C et al 2016 Ablation-cooled material removal with ultrafast bursts of pulses Nature 53784–88 |
Ródenas A, Gu M, Corrielli G, Paiè P, John S, Kar A K and Osellame R 2019 Three-dimensional femtosecond laser nanolithography of crystals Nat. Photon. 13105–9 |
Žemaitis A, Geˇ cys P, Barkauskas M, Raˇ ciukaitis G and Gedvilas M 2019 Highly-efficient laser ablation of copper by bursts of ultrashort tuneable (fs-ps) pulses Sci. Rep. 912280 |
Sugioka K and Cheng Y 2014 Ultrafast lasers—reliable tools for advanced materials processing Light Sci. Appl. 3 e149 |
Gan Z S, Cao Y Y, Evans R A and Gu M 2013 Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size Nat. Commun. 42061 |
Li Z Z, Wang L, Fan H, Yu Y H, Chen Q D, Juodkazis S and Sun H B 2020 O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment Light Sci. Appl. 941 |
Romoli L and Vallini R 2016 Experimental study on the development of a micro-drilling cycle using ultrashort laser pulses Opt. Lasers Eng. 78121–31 |
Romoli L, Rashed C A A and Fiaschi M 2014 Experimental characterization of the inner surface in micro-drilling of spray holes: a comparison between ultrashort pulsed laser and EDM Opt. Laser Technol. 5635–42 |
Li Q, Yang L J, Hou C J, Adeyemi O, Chen C Y and Wang Y 2019 Surface ablation properties and morphology evolution of K24 nickel based superalloy with femtosecond laser percussion drilling Opt. Lasers Eng. 11422–30 |
Zhang Z F, Wang W H, Jiang R S, Zhang X B, Xiong Y F and Mao Z 2020 Investigation on geometric precision and surface quality of microholes machined by ultrafast laser Opt. Laser Technol. 121105834 |
Zhao J, Wang W J, Wang R J and Cui J L 2018 Machining millimeter-scale deep holes in SiCf/SiC material using femtosecond laser filamentation effect Mater. Sci. Adv. Compos. Mater. 21 |
Žemaitis A, Gaidys M, Gecys P, Barkauskas M and Gedvilas M 2021 Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates Opt. Express 297641–53 |
Li T, Ren N F, Wang H X, Zhou W, Wu N E, Xia K B, Xu Y and Tian J N 2020 Femtosecond laser layered ring trepanning of stainless steel sheets with and without transverse magnetic assistance Opt. Laser Technol. 129106231 |
Wang R J, Dong X, Wang K D, Sun X M, Fan Z J and Duan W Q 2019 Two-step approach to improving the quality of laser micro-hole drilling on thermal barrier coated nickel base alloys Opt. Lasers Eng. 121406–15 |
Liu Y S, Zhang R H, Li W N, Wang J, Yang X J, Cheng L F and Zhang L T 2018 Effect of machining parameter on femtosecond laser drilling processing on SiC/SiC composites Int. J. Adv. Manuf. Technol. 961795–811 |
Wang Q X, Chen A M, Li S Y, Qi H X, Qi Y, Hu Z and Jin M X 2015 Influence of ambient pressure on the ablation hole in femtosecond laser drilling Cu Appl. Opt. 548235–40 |
Wang M L, Yang L J, Zhang S and Wang Y 2018 Experimental investigation on the spiral trepanning of K24 superalloy with femtosecond laser Opt. Laser Technol. 101284–90 |
Li F P, Feng G, Yang X J, Li X G, Ma G and Lu C J 2020 Research on microhole processing technology based on the femtosecond-laser spiral trepanning method Appl. Sci. 107508 |
Tan Y X, Chu W, Wang P, Li W B, Wang Z and Cheng Y 2019 Water-assisted laser drilling of high-aspect-ratio 3D microchannels in glass with spatiotemporally focused femtosecond laser pulses Opt. Mater. Express 91971–8 |
Auerswald J, Ruckli A, Gschwilm T, Weber P, Diego-Vallejo D and Schluter H 2016 Taper angle correction in cutting of complex micro-mechanical contours with ultra-short pulse laser J. Mech. Eng. Autom. 6334–8 |
Mincuzzi G, Faucon M and Kling R 2019 Novel approaches in zero taper, fast drilling of thick metallic parts by ultra-short pulse laser Opt. Lasers Eng. 11852–57 |
Wang M L, Mei W and Wang Y 2019 Simulation of femtosecond laser ablation sapphire based on free electron density Opt. Laser Technol. 113123–8 |
Davydov R V and Antonov V I 2018 Computer simulation of femtosecond pulsed laser ablation of aluminium and copper J. Phys.: Conf. Ser. 1124081037 |
Garcia-Lechuga M, Gebrayel El Reaidy G, Ning H, Delaporte P and Grojo D 2020 Assessing the limits of determinism and precision in ultrafast laser ablation Appl. Phys. Lett. 117171604 |
Miyasaka Y, Hashida M, Nishii T, Inoue S and Sakabe S 2015 Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization Appl. Phys. Lett. 106013101 |
Fan P X, Pan R and Zhong M L 2019 Ultrafast laser enabling hierarchical structures for versatile superhydrophobicity with enhanced Cassie–Baxter stability and durability Langmuir 3516693–711 |
Zhang Y Y, Jiao Y L, Li C Z, Chen C, Li J W, Hu Y L, Wu D and Chu J R 2020 Bioinspired micro/nanostructured surfaces prepared by femtosecond laser direct writing for multi-functional applications Int. J. Extreme Manuf. 2032002 |
Racine V, Le Barh M, Killaire G and Weck A 2019 Effect of polarization on ripple formation in deep femtosecond laser machined cavities J. Mater. Process. Technol. 271162–71 |
Hu Y W et al 2016 LIPSS formed on the sidewalls of microholes in stainless steel trepanned by a circularly polarized femtosecond laser Appl. Phys. A 122665 |